FP7
E450LMDAP
European 450mm Lithography and Metrology Development for Advanced Patterning
- Programme
- Seventh Framework Programme
- Started
- Ends
- Duration
- 36 months
- Total cost
- EUR 459,306,458
- EU contribution
- EUR 68,895,969
- Participants
- 39 from 5 countries
- Topic
- FP7_SP1-JTI-ENIAC-2013-2-7
- Grant agreement
- 621280
Coordinated by Asml Netherlands B.V. (NLNetherlands).
Consortium
EU contribution per participant as the open data of CORDIS states it; for a participant with linked third parties it may include their share, and a participant whose amount the data does not hold or cannot make consistent shows Not stated. A participant who left the project is not listed; see the history below.
| Organisation | Country | Role | EU contribution | Recognised by |
|---|---|---|---|---|
| Asml Netherlands B.V. | NLNetherlands | Coordinator | EUR 15,516,436 | PIC (1.00) |
| Asm Belgium NV | BEBelgium | Participant | EUR 423,036 | PIC (1.00) |
| Asml Belgium Bvba | BEBelgium | Participant | EUR 362,257 | PIC (1.00) |
| Interuniversitair Micro-Electronica Centrum | BEBelgium | Participant | EUR 631,151 | PIC (1.00) |
| Advanced Mask Technology Center GmbH & Co KG | DEGermany | Participant | EUR 486,384 | PIC (1.00) |
| Asml Berlin GmbH | DEGermany | Participant | EUR 3,277,793 | PIC (1.00) |
| ASYS GmbH & Co. KG | DEGermany | Participant | EUR 250,119 | PIC (1.00) |
| Carl Zeiss Sms GmbH | DEGermany | Participant | EUR 300,203 | PIC (1.00) |
| Carl Zeiss SMT GmbH | DEGermany | Participant | EUR 16,653,951 | PIC (1.00) |
| GLOBALFOUNDRIES Dresden Module One LLC & Co. KG | DEGermany | Participant | Not stated | PIC (1.00) |
| Integrated Dynamics Engineering GmbH | DEGermany | Participant | EUR 1,468,220 | PIC (1.00) |
| Robert Bosch GmbH | DEGermany | Participant | EUR 515,862 | PIC (1.00) |
| SemiLev GmbH | DEGermany | Participant | EUR 65,441 | PIC (1.00) |
| Toppan Photomasks Germany GmbH | DEGermany | Participant | EUR 590,482 | PIC (1.00) |
| Centre National de la Recherche Scientifique Cnrs | FRFrance | Participant | EUR 59,173 | known name (0.95) |
| Coventor Sarl | FRFrance | Participant | EUR 172,391 | PIC (1.00) |
| Entegris Cleaning Process (ECP) SAS | FRFrance | Participant | EUR 53,281 | PIC (1.00) |
| Ippon Innovation | FRFrance | Participant | EUR 53,172 | PIC (1.00) |
| Pfeiffer Vacuum | FRFrance | Participant | EUR 377,048 | PIC (1.00) |
| Recif Technologies | FRFrance | Participant | EUR 45,207 | PIC (1.00) |
| Stmicroelectronics Crolles 2 Sas | FRFrance | Participant | EUR 616,581 | PIC (1.00) |
| Applied Materials Israel Ltd | ILIsrael | Participant | EUR 7,341,572 | PIC (1.00) |
| Bruker Technologies Ltd | ILIsrael | Participant | EUR 773,334 | PIC (1.00) |
| Kla-Tencor Corporation (Israel) | ILIsrael | Participant | EUR 2,287,898 | PIC (1.00) |
| Nanomotion Ltd. | ILIsrael | Participant | EUR 405,951 | PIC (1.00) |
| Nova Ltd | ILIsrael | Participant | EUR 1,601,197 | PIC (1.00) |
| Aae BV | NLNetherlands | Participant | EUR 75,484 | PIC (1.00) |
| Benchmark Electronics B.V. | NLNetherlands | Participant | EUR 252,060 | PIC (1.00) |
| Bosch Rexroth B.V. | NLNetherlands | Participant | EUR 117,150 | PIC (1.00) |
| Irmato Industrial Solutions Eindhoven BV | NLNetherlands | Participant | EUR 252,911 | PIC (1.00) |
| Kmwe Precision BV | NLNetherlands | Participant | EUR 485,070 | PIC (1.00) |
| Nederlandse Organisatie Voor Toegepast Natuurwetenschappelijk Onderzoek Tno | NLNetherlands | Participant | EUR 798,485 | known name (0.95) |
| Neways Technologies BV | NLNetherlands | Participant | EUR 252,497 | PIC (1.00) |
| Prodrive Technologies BV | NLNetherlands | Participant | EUR 285,951 | PIC (1.00) |
| Reden B.V. | NLNetherlands | Participant | EUR 58,363 | PIC (1.00) |
| SEGULA Technologies Nederland B.V. | NLNetherlands | Participant | EUR 66,287 | PIC (1.00) |
| Sioux Ccm BV | NLNetherlands | Participant | EUR 297,168 | PIC (1.00) |
| Technische Universiteit Delft | NLNetherlands | Participant | EUR 206,394 | known name (0.95) |
| Vdl Enabling Technologies Group Eindhoven BV | NLNetherlands | Participant | EUR 10,373,343 | PIC (1.00) |
Changes of the consortium
First seen on with 39 participants from 5 countries.
A snapshot of each project's members is taken once a month; a change is recorded when a snapshot differs from the one before. A project with no change listed has had the same members since it was first observed.
Project page on CORDIS (opens in new tab)
Where this comes from
- CORDIS: EU research projects (Horizon Europe, Horizon 2020, FP7)Last read on . Licence: Commission Decision 2011/833/EU (reuse of Commission documents). Source: CORDIS, European Commission.Participants and amounts as the Commission's CORDIS database states them.
EU contribution is the amount CORDIS's open data pays to the participant. For a participant with linked third parties it may include their share (the CORDIS page prints the net); an amount the data does not hold is left out, not counted as zero. EDF factsheets state none per participant, so EDF projects count as projects but add nothing to the amounts.
Organisation-level facts only: a name, a country, a role, an amount, a year. A participant is recognised by its PIC where the source gives one, otherwise by name; the page says which. How the data is built.