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H2020

TAPES3

Technology Advances for Pilotline of Enhanced Semiconductors for 3nm

Programme
Horizon 2020
Started
Ends
Duration
40 months
Total cost
EUR 121,116,315
EU contribution
EUR 28,192,938
Participants
37 from 8 countries
Topic
H2020_ECSEL-2017-1
Grant agreement
783247

Coordinated by Asml Netherlands B.V. (NLNetherlands).

Consortium

EU contribution per participant as the open data of CORDIS states it; for a participant with linked third parties it may include their share, and a participant whose amount the data does not hold or cannot make consistent shows Not stated. A participant who left the project is not listed; see the history below.

Members of the consortium, coordinator first
OrganisationCountryRoleEU contributionRecognised by
Asml Netherlands B.V.NLNetherlandsCoordinatorEUR 7,577,677PIC (1.00)
Lam Research AGATAustriaParticipantEUR 0PIC (1.00)
Applied Materials BelgiumBEBelgiumParticipantEUR 71,562PIC (1.00)
Interuniversitair Micro-Electronica CentrumBEBelgiumParticipantEUR 7,371,530PIC (1.00)
Jsr Micro NVBEBelgiumParticipantEUR 92,061PIC (1.00)
Lam Research BelgiumBEBelgiumThird partyNot statedPIC (1.00)
Siemens Industry Software NVBEBelgiumParticipantEUR 183,675PIC (1.00)
Paul Scherrer InstitutCHSwitzerlandParticipantEUR 134,952known name (0.95)
Advanced Mask Technology Center GmbH & Co KGDEGermanyParticipantEUR 80,488PIC (1.00)
Carl Zeiss Smt GmbHDEGermanyParticipantEUR 4,156,250PIC (1.00)
Fraunhofer Gesellschaft Zur Forderung der Angewandten Forschung EvDEGermanyParticipantEUR 387,050known name (0.95)
Institut Fuer Mikroelektronik StuttgartDEGermanyParticipantEUR 867,464PIC (1.00)
Optix Fab GmbHDEGermanyParticipantEUR 168,438PIC (1.00)
Physikalisch-Technische BundesanstaltDEGermanyParticipantEUR 187,396known name (0.97)
Rheinisch-Westfaelische Technische Hochschule AachenDEGermanyParticipantEUR 169,906PIC (1.00)
Siltronic AGDEGermanyParticipantEUR 457,088PIC (1.00)
Suss Microtec Solutions GmbH & Co KGDEGermanyParticipantEUR 37,500PIC (1.00)
Siemens Industry Software a Limitedliability Company Under the Privatefree Zones RegimeEGEgyptThird partyNot statedPIC (1.00)
Coventor SarlFRFranceParticipantEUR 358,803PIC (1.00)
Ion Beam ServicesFRFranceParticipantEUR 274,096PIC (1.00)
Recif TechnologiesFRFranceParticipantEUR 119,192PIC (1.00)
Siemens Electronic Design Automation SarlFRFranceThird partyNot statedPIC (1.00)
Applied Materials Israel LtdILIsraelParticipantEUR 1,462,650PIC (1.00)
Kla-Tencor Corporation (Israel)ILIsraelParticipantEUR 346,185PIC (1.00)
Nova LtdILIsraelParticipantEUR 943,250PIC (1.00)
Demcon Bunova B.V.NLNetherlandsThird partyNot statedPIC (1.00)
Demcon High-Tech Systems Enschede BVNLNetherlandsThird partyNot statedPIC (1.00)
Demcon Industrial Systems Groningen BVNLNetherlandsThird partyNot statedPIC (1.00)
Demcon Innovation & Technology B.V.NLNetherlandsThird partyNot statedPIC (1.00)
Demcon Life Sciences & Health Enschede BVNLNetherlandsParticipantEUR 345,000PIC (1.00)
Demcon Life Sciences & Healtheindhoven B.V.NLNetherlandsThird partyNot statedPIC (1.00)
Demcon Production BVNLNetherlandsThird partyNot statedPIC (1.00)
Fei Electron Optics BVNLNetherlandsParticipantEUR 845,012PIC (1.00)
Nederlandse Organisatie Voor Toegepast Natuurwetenschappelijk Onderzoek TnoNLNetherlandsParticipantEUR 634,375known name (0.95)
Vdl Enabling Technologies Group BVNLNetherlandsThird partyNot statedPIC (1.00)
Vdl Enabling Technologies Group Eindhoven BVNLNetherlandsThird partyNot statedPIC (1.00)
Vdl Etg Technology & Development BVNLNetherlandsParticipantEUR 891,603PIC (1.00)

Changes of the consortium

First seen on with 37 participants from 8 countries.

A snapshot of each project's members is taken once a month; a change is recorded when a snapshot differs from the one before. A project with no change listed has had the same members since it was first observed.

Project page on CORDIS (opens in new tab)

Where this comes from

EU contribution is the amount CORDIS's open data pays to the participant. For a participant with linked third parties it may include their share (the CORDIS page prints the net); an amount the data does not hold is left out, not counted as zero. EDF factsheets state none per participant, so EDF projects count as projects but add nothing to the amounts.

Organisation-level facts only: a name, a country, a role, an amount, a year. A participant is recognised by its PIC where the source gives one, otherwise by name; the page says which. How the data is built.